Turn key Systems for the Semiconductor Industry
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Cost wise competitive, leading with the
highest reliability, Conveyor networks outperform all other fab dispatch
systems in throughput and cycle time performance. We would most welcome an
opportunity to provide a quotation for comparison to other systems.
Middlesex is a provider of turn key
material handling system installations (AMHS) for the Semiconductor industry.
Our model is based on a conveyor transport network, integrated across inter and
intra bay spaces without discontinuity, at ceiling level. Stockers at strategic
locations also use ceiling space wherever available. All transport lots are dispatched
and monitored by a conveyor specific control system, under an MES supervisor.
Wafer form factors of 200 mm or less employ
floor level buffers and manual interface to process tools. The 300 mm form
factor wafer fabs use ceiling mounted buffers and hoist type interface to
process tools.
Both system types are available in class
one form for open wafer handling environments. While the 200 mm transport
network is capable of transporting various types of open or closed wafer
carriers, the 300 mm transport network is focused on transporting the FOUP.
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